Category - Textbook/Educational Curriculum / College & Above

Format - Hardcover

Condition - New

Listed - 4 months ago

Est. Publication Date - Jul 2011

Manufacturing Techniques for Microfabrication and Nanotechnology

Publisher Description

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive mat...